Exergy heat exchangers are ideally suited for semiconductor applications. Manufactured in all 316L Stainless Steel and used in a wide range of temperatures and pressures.
Semiconductor
Major Customers
- Applied Materials
- ASML
- Entegris
- Intel
- LAM
- SAES Pure Gas
- Varian
Typical Applications
- Fine temperature control
- Processing equipment
- High purity for cleanrooms
- Lithography tools
- Gas purifiers
- Integrated fittings
Features & Benefits
- Tube stub fittings for orbital welding
- Customized special fittings
- Cleaned and bagged for Cleanroom use
- High pressure rating
- Compact design
- Precise temp control
