Semiconductor High Purity For Cleanrooms

Exergy heat exchangers are ideally suited for semiconductor applications. Manufactured in all 316L Stainless Steel and used in a wide range of temperatures and pressures.

Major Customers

  • Applied Materials
  • ASML
  • Entegris
  • Intel
  • LAM
  • SAES Pure Gas
  • Varian

Typical Applications

  • Fine temperature control
  • Processing equipment
  • High purity for cleanrooms
  • Lithography tools
  • Gas purifiers
  • Integrated fittings

Features & Benefits

  • Tube stub fittings for orbital welding
  • Customized special fittings
  • Cleaned and bagged for Cleanroom use
  • High pressure rating
  • Compact design
  • Precise temp control